The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2005
Filed:
Nov. 10, 2000
Applicants:
Hiroshi Yokoyama, Ibaraki, JP;
Kazumi Haga, Tokyo, JP;
Inventors:
Hiroshi Yokoyama, Ibaraki, JP;
Kazumi Haga, Tokyo, JP;
Assignees:
National Institute of Advanced Industrial Science and Technology, Tokyo, JP;
NanoSystem Solutions, Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B027/42 ; G03B027/52 ; G03B027/54 ;
U.S. Cl.
CPC ...
Abstract
A projection exposure apparatus comprising: a display device having a reflection-type or transmission-type display portion on which a predetermined image to be exposed is displayed; a stage for holding a substrate to be exposed; and a telecentric-type projection lens for projecting the predetermined image displayed on the display portion onto the surface of the substrate held on the stage.