The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2005
Filed:
Mar. 26, 2003
Mark William Curry, Morgan Hill, CA (US);
Daniel Paul Greenbank, San Jose, CA (US);
Danny Cam Toan LU, San Francisco, CA (US);
Mark William Curry, Morgan Hill, CA (US);
Daniel Paul Greenbank, San Jose, CA (US);
Danny Cam Toan Lu, San Francisco, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method and apparatus for monitoring operating characteristics and/or control signals of a system comprising a variable speed vacuum pump. Operating characteristics and/or control signals of the system may be monitored, and the pumping speed of the variable speed vacuum pump may be altered responsive to the monitored operating characteristics and/or control signals.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile