The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2005
Filed:
Jun. 25, 2004
Applicants:
Naoki Yasumitsu, Yokohama, JP;
Eiichi Hiraoka, Kodaira, JP;
Yoshiyuki Tomita, Hiratsuka, JP;
Inventors:
Assignee:
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J001/00 ; G21G005/00 ; C23C016/00 ;
U.S. Cl.
CPC ...
Abstract
An airtight processing apparatus comprises a chamber having a side wall and a bottom wall airtightly fixed to the side wall, and a bed supported inside the chamber by the side wall with a gap from the bottom wall.