The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2005
Filed:
Dec. 07, 2001
Günter Igel, Teningen, DE;
Markus Rogalla, Bad Krozingen, DE;
Günter Igel, Teningen, DE;
Markus Rogalla, Bad Krozingen, DE;
Micronas GmbH, Freiburg, DE;
Abstract
The invention relates to a method for producing a sensor (), wherein a carrier chip () is produced. Said chip is provided with a sensor structure () comprising an active sensor surface (). A material () capable of flowing is applied onto carrier chips () in such a way that the sensor structure () has a thinner layer thickness on said active sensor surface () than on the area of the carrier chip () which borders on the active sensor surface (). The material () which is capable of flowing is hardened thereafter. The hardened material () is subsequently removed by chemical means from the surface which faces said carrier chip () until the active sensor surface of the sensor structure is layed bare.