The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2005
Filed:
Feb. 14, 2002
Dan A. Steinberg, Blacksburg, VA (US);
Jasean Rasnake, Blacksburg, VA (US);
David W. Sherrer, Blacksburg, VA (US);
Dan A. Steinberg, Blacksburg, VA (US);
Jasean Rasnake, Blacksburg, VA (US);
David W. Sherrer, Blacksburg, VA (US);
Shipley Company, L.L.C., Marlborough, MA (US);
Abstract
A micromachined structure, comprising: a substarte; a first wet etched pit disposed in the substrate; a second wet etched pit disposed in the substrate, the second pit extending into the substrate a greater depth than the first pit; and a dry pit disposed between, and adjacent to, the first and second pits. Also disclosed is a micromachined substrate comprising: a wet etched pit; and a dry-etched hole disposed in the wet etched pit, wherein the dry hole extends through the substrate.