The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2005
Filed:
Nov. 21, 2003
Applicants:
Irina Belov, Zionsville, IN (US);
Lothar Puppe, Burscheid, DE;
Gerd W. Passing, Hürth, DE;
Thomas J. Hunt, Peekskill, NY (US);
Inventors:
Irina Belov, Zionsville, IN (US);
Lothar Puppe, Burscheid, DE;
Gerd W. Passing, Hürth, DE;
Thomas J. Hunt, Peekskill, NY (US);
Assignee:
Praxair Technology, Inc., Danbury, CT (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09K013/00 ;
U.S. Cl.
CPC ...
Abstract
Provided is a novel high selectivity aqueous slurry composition method of utilizing same. The composition includes non-modified silica based abrasive particles in an amount of about 5 to about 50 weight percent, and an organic compound in an amount of about 0.001 to about 2.0 weight percent in an aqueous solution, wherein the silicon oxide to silicon nitride selectivity ratio ranges from about 50 to about 700.