The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2005
Filed:
May. 27, 2003
Applicants:
Masayuki Murayama, Chiyoda-ku, JP;
Kyoji Nakamura, Chiyoda-ku, JP;
Taro Ogata, Chiyoda-ku, JP;
Susumu Mori, Chiyoda-ku, JP;
Inventors:
Masayuki Murayama, Chiyoda-ku, JP;
Kyoji Nakamura, Chiyoda-ku, JP;
Taro Ogata, Chiyoda-ku, JP;
Susumu Mori, Chiyoda-ku, JP;
Assignee:
Nikon Corporation, Chiyoda-ku, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B027/52 ; G03B027/42 ;
U.S. Cl.
CPC ...
Abstract
An optical apparatus having at least one optical element arranged along an optical path of an irradiation light. A first hermetic chamber is defined along the optical path separating the optical path from ambient air and charged with a predetermined gas. A second hermetic chamber is located in the first hermetic chamber separating the optical path from the gas in the first hermetic chamber and retaining the optical elements.