The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2005
Filed:
Jun. 17, 2003
Koji Sasaki, Kanagawa, JP;
Hironobu Narui, Kanagawa, JP;
Katsunori Yanashima, Kanagawa, JP;
Akihiko Memezawa, Kanagawa, JP;
Koji Sasaki, Kanagawa, JP;
Hironobu Narui, Kanagawa, JP;
Katsunori Yanashima, Kanagawa, JP;
Akihiko Memezawa, Kanagawa, JP;
Sony Corporation, Tokyo, JP;
Abstract
A thin film formation apparatus by which source gas is supplied uniformly to the surface of a substrate so that an organic thin film of a uniform film thickness can be formed on the surface of the substrate. The thin film formation apparatus includes a vacuum chamber (), a substrate holder () provided in the vacuum chamber (), and a gas supplying end element () for supplying gas toward a substrate mounting face () of the substrate holder (). The gas supplying end element () is formed so as to supply the source gas in an elongated rectangular shape to the substrate mounting face ().
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile