The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2005
Filed:
Oct. 01, 2002
Harshad Shrikrishna Sane, Burlington, MA (US);
Navid Yazdi, Wilmington, MA (US);
Carlos Horacio Mastrangelo, Andover, MA (US);
Harshad Shrikrishna Sane, Burlington, MA (US);
Navid Yazdi, Wilmington, MA (US);
Carlos Horacio Mastrangelo, Andover, MA (US);
Corning Incorporated, Corning, NY (US);
Abstract
The present invention is directed to a control system for a MEMS device, such as a MEMS mirror, that uses sliding mode analysis to accurately and predictably control the position of the mirrors in a MEMS device. The present invention also uses the capacitance of the mirror to detect the position of the mirror. In one embodiment, a MEMS mirror device mounted on a substrate is described that includes, a micro mirror that is pivotable about an axis, a first conductive layer on the mirror, a second conductive layer on the substrate, the first and second conductive layers form a first capacitor for determining the position of the mirror. The sliding mode control can be implemented using various drive mechanisms, including electrostatic drives. When used with electrostatic drives, conductive layers that create the capacitors can also be used to drive the mirror. The detection-drive system can be time multiplexed to simplify implementation and to avoid cross talk. An application Specific Integrated Circuit (ASIC) can be used to control the detection and drive of the mirrors.