The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2005
Filed:
Mar. 28, 2002
Applicants:
Hitoshi Sakamoto, Takasago, JP;
Noriaki Ueda, Kobe, JP;
Takashi Sugino, Toyonaka, JP;
Inventors:
Assignee:
Kabushiki Kaisha Watanabe Shoko, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H001/24 ;
U.S. Cl.
CPC ...
Abstract
A plasmais generated within a film formation chamber, and mainly a nitrogen gasis excited within the film formation chamber. Then, the excited nitrogen gasis reacted with a diborane gasdiluted with a hydrogen gas, thereby forming a boron nitride filmon a substrate. Thus, the boron nitride filmexcellent in mechanical and chemical resistance, high in thermal conductivity, and having a low relative dielectric constant κ can be formed speedily.