The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2005
Filed:
Feb. 05, 2004
Gregory S. Boettcher, Hopewell Junction, NY (US);
Steven B. Gold, Wappingers Falls, NY (US);
Robert P. Katz, Lagrangeville, NY (US);
Gabriel V. Moore, Wappingers Falls, NY (US);
Gregory S. Boettcher, Hopewell Junction, NY (US);
Steven B. Gold, Wappingers Falls, NY (US);
Robert P. Katz, Lagrangeville, NY (US);
Gabriel V. Moore, Wappingers Falls, NY (US);
International Business Machiens Corporation, Armonk, NY (US);
Abstract
An in-situ wear indicator for detecting wear to at least one selected part in a semiconductor manufacturing environment. The indicator is manufactured in a selected material with a selected thickness so that the indicator degrades upon exposure to the semiconductor manufacturing process at a fixed rate relative to the wear of the selected part. The indicator displays a visual indication of wear which is discernible by an automated detection device.