The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2005
Filed:
Aug. 07, 2003
Applicants:
Eiji Fujii, Ibaraki, JP;
Toyoji Ito, Otsu, JP;
Inventors:
Eiji Fujii, Ibaraki, JP;
Toyoji Ito, Otsu, JP;
Assignee:
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01G004/005 ; H01G004/06 ;
U.S. Cl.
CPC ...
Abstract
A capacitor element includes a lower electrode, a ferroelectric film, and an upper electrode that are formed on a substrate. In the capacitor element, the ferroelectric film is formed by a reaction rate-determining method, and the lower electrode has a thickness of not more than 100 nm, and variation of the thickness of not more than 10%. With this, a capacitor element in which the composition variation of the ferroelectric film is suppressed, and a method for producing the same, are provided.