The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6954002 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 11, 2005

Filed:

Aug. 29, 2002
Applicants:

Shoaib H. Zaidi, Poughkeepsie, NY (US);

Gary Williams, Mechanicsville, VA (US);

Alois Gutmann, Poughkeepsie, NY (US);

Inventors:

Shoaib H. Zaidi, Poughkeepsie, NY (US);

Gary Williams, Mechanicsville, VA (US);

Alois Gutmann, Poughkeepsie, NY (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L029/06 ; H01L023/544 ;
U.S. Cl.
CPC ...
Abstract

A semiconductor wafer comprises a semiconductor substrate, a surface alignment mark visible on the semiconductor surface and a plurality of nanostructures on the surface of the surface alignment mark having an average pitch adapted to reduce reflectivity of the surface alignment mark in a predetermined light bandwidth.


Find Patent Forward Citations

Zaidi, Shoaib. (2005). System and method of enhancing alignment marks (U.S. Patent No. 6954002). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6954002

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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