The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2005
Filed:
Jun. 09, 2003
Koichi Kimura, Kanagawa, JP;
Hiroshi Sunagawa, Kanagawa, JP;
Koichi Kimura, Kanagawa, JP;
Hiroshi Sunagawa, Kanagawa, JP;
Fuji Photo Film Co., Ltd., Kanagawa, JP;
Abstract
A light modulating device comprising a plurality of light modulating elements modulating the light that is incident thereto and emitting the light, wherein each of the light modulating elements is formed from a micro electronic machinery which is two-dimensionally arranged, and the transmittance can be controlled so as to vary for each of the light modulating elements. The light modulating device further comprises a lens array on a light-incident side of the light modulating elements, and the lens array condenses the incident light, which impinges on each of the light modulating elements, into a region whose area is smaller than an area occupied by each of the light modulating elements at a light-incident side thereof. Consequently, the light modulating device, in which usability of the light is improved and resolution is increased in the projection exposure, and the exposure apparatus using the same can be obtained.