The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2005
Filed:
Jan. 14, 2002
Charles Michael Birtcher, Valley Center, CA (US);
Martin Castaneda Martinez, Oceanside, CA (US);
Thomas Andrew Steidl, Escondido, CA (US);
Gil Vivanco, San Diego, CA (US);
David James Silva, San Diego, CA (US);
Charles Michael Birtcher, Valley Center, CA (US);
Martin Castaneda Martinez, Oceanside, CA (US);
Thomas Andrew Steidl, Escondido, CA (US);
Gil Vivanco, San Diego, CA (US);
David James Silva, San Diego, CA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
The present invention is an apparatus for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, and; e) a second manifold for delivering the process chemical from the process container to a process tool. A process for using the apparatus is also contemplated.