The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6953005 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 11, 2005

Filed:

Jan. 29, 2004
Applicant:

Masayasu Suzuki, Hadano, JP;

Inventor:

Masayasu Suzuki, Hadano, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C016/00 ;
U.S. Cl.
CPC ...
Abstract

A dielectric window performs three functions, namely, (1) extraction of a microwave, (2) generation and transmission of a surface wave, and (3) keeping the vacuum. An O-ring, which keeps the vacuum between the dielectric window and a chamber, is arranged so as to surround the vicinity of a bottom plateof a microwave waveguide. Dielectric plates area arranged in parallel with each other in the dielectric window and performs only the transmission of a surface wave. The dielectric plates may be different from the dielectric window in at least one of a shape, a thickness, and a dielectric constant.


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Suzuki, Masayasu. (2005). Plasma processing apparatus utilizing a surface wave plasma (U.S. Patent No. 6953005). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6953005

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