The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2005
Filed:
May. 23, 2003
Applicants:
Jennifer M. Rieker, Bethlehem, PA (US);
Thomas Wieder, Emmaus, PA (US);
Dana L. Durham, Pittstown, NJ (US);
Inventors:
Jennifer M. Rieker, Bethlehem, PA (US);
Thomas Wieder, Emmaus, PA (US);
Dana L. Durham, Pittstown, NJ (US);
Assignee:
Air Products and Chemicals, Inc., Allentown, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F007/30 ; G03F007/32 ; C11D009/00 ;
U.S. Cl.
CPC ...
Abstract
Compositions containing certain amines and/or quaternary ammonium compounds, hydroxylamine, corrosion inhibitor, organic diluent and optionally water are capable of removing photoresist, photoresist byproducts and residue and etching residues from a substrate.