The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2005
Filed:
Aug. 25, 2003
Satoshi Yamaguchi, Toyonaka, JP;
Yasunori Uetani, Tsukuba, JP;
Hiroshi Moriuma, Toyonaka, JP;
Sumitomo Chemical Company, Limited, Osaka, JP;
Abstract
The present invention provides a sulfonate of the formula (I):wherein Q, Q, Q, Qand Qeach independently represent hydrogen, alkyl having 1 to 16 carbon atoms, alkoxy having 1 to 16 carbon atoms, halogen, aryl having 6 to 12 carbon atoms, aralkyl having 7 to 12 carbon atoms, cyano, sulfide, hydroxy, nitro or a group of the formula (I')—COO—X—Cy  (I′)wherein X represents alkylene and at least one —CH— in the alkylene may be substituted by —O— or —S—, and Cyrepresents alicyclic hydrocarbon having 3 to 20 carbon atoms,and Arepresents a counter ion, with the proviso that at least one of Q, Q, Q, Qand Qis the group of the formula (I′). The present invention also provides a chemical amplification type positive resist composition comprising a sulfonate of the formula (I) and resin which contains a structural unit having an acid labile group and which itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid.