The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2005
Filed:
Jan. 16, 2003
James J. Donald, Phoenix, AZ (US);
James J. Donald, Phoenix, AZ (US);
ASM America, Inc., Phoenix, AZ (US);
Abstract
An optical substrate placement device is disclosed employing light from the surface of a rotating substrate in order to generate a signal component which oscillates at the frequency of rotation of the substrate. The magnitude of another signal resulting from filtering the signal component at the frequency of rotation, when processed, reveals whether the substrate is misplaced or 'out-of-pocket.' Preferred embodiments employ reactor heat lamps as the light source. Methods of detecting whether a substrate is misplaced are also provided.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile