The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2005
Filed:
Feb. 27, 2003
Applicants:
Masanobu Ikeda, Kawasaki, JP;
Takashi Suzuki, Kawasaki, JP;
Inventors:
Masanobu Ikeda, Kawasaki, JP;
Takashi Suzuki, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L029/73 ; H01L029/40 ; H01L023/48 ; H01L023/52 ;
U.S. Cl.
CPC ...
Abstract
In a wiring structure in which a wiring portion and a plug portion each made of a Cu material are formed integrally through a damascene process, the difference between deviation stress applied to the wiring portion in a longitudinal direction and deviation stress applied to the plug portion in a direction perpendicular to the central axis of the plug portion is controlled to be 220 MPa or less.
Ikeda, Masanobu. (2005). Wiring structure having integral wiring portion and plug portion and method of forming the same (U.S. Patent No. 6949828). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6949828
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile