The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2005
Filed:
Aug. 31, 2001
Mizuki Suto, Yamaguchi-ken, JP;
Ichiro Mikami, Yamaguchi-ken, JP;
Tohru Nonaka, Yamaguchi-ken, JP;
Seiji Tono, Yamaguchi-ken, JP;
Mizuki Suto, Yamaguchi-ken, JP;
Ichiro Mikami, Yamaguchi-ken, JP;
Tohru Nonaka, Yamaguchi-ken, JP;
Seiji Tono, Yamaguchi-ken, JP;
Tokuyama Corporation, Yamaguchi, JP;
Abstract
A solution for washing away residue, comprising an aqueous solution of a water-soluble high molecular compound in which is dissolved at least one kind of dissolving agent selected from an amine and a fluoride. The washing solution is capable of effectively washing away the residue formed during the production of electronic circuits, is very lowly corrosive to the insulating films, low-dielectric interlayer insulating films and wirings, and offers an advantage of little generating foam.