The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2005
Filed:
Apr. 11, 2002
Tadahiro Ohmi, Sendai-shi, Miyagi-ken 980, JP;
Takashi Imaoka, Miyagi-ken 980, JP;
Hisayuki Shimada, Sendai-shi, Miyagi-ken 980, JP;
Nobuhiro Konishi, Sendai-shi, Miyagi-ken 980, JP;
Mizuho Morita, Sendai-shi, Miyagi-ken 980, JP;
Takeo Yamashita, Sendai-shi, Miyagi-ken 980, JP;
Tadashi Shibata, Sendai-shi, Miyagi-ken 980, JP;
Hidetoshi Wakamatsu, Sendai-shi, Miyagi-ken 980, JP;
Jinzo Watanabe, Sendai-shi, Miyagi-ken 980, JP;
Shintaro Aoyama, Sendai-shi, Miyagi-ken 980, JP;
Masakazu Nakamura, Sendai-shi, Miyagi-ken 980, JP;
Tadahiro Ohmi, Sendai-shi, Miyagi-ken 980, JP;
Takashi Imaoka, Miyagi-ken 980, JP;
Hisayuki Shimada, Sendai-shi, Miyagi-ken 980, JP;
Nobuhiro Konishi, Sendai-shi, Miyagi-ken 980, JP;
Mizuho Morita, Sendai-shi, Miyagi-ken 980, JP;
Takeo Yamashita, Sendai-shi, Miyagi-ken 980, JP;
Tadashi Shibata, Sendai-shi, Miyagi-ken 980, JP;
Hidetoshi Wakamatsu, Sendai-shi, Miyagi-ken 980, JP;
Jinzo Watanabe, Sendai-shi, Miyagi-ken 980, JP;
Shintaro Aoyama, Sendai-shi, Miyagi-ken 980, JP;
Masakazu Nakamura, Sendai-shi, Miyagi-ken 980, JP;
Other;
Abstract
A method of forming an oxide film having high insularity capability is performed within an ultra clean environment, using charged particles.