The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2005
Filed:
May. 27, 2003
Hirohito Yamaguchi, Kanagawa, JP;
Masahiro Kanai, Tokyo, JP;
Atsushi Koike, Kanagawa, JP;
Katsunori Oya, Kanagawa, JP;
Hirohito Yamaguchi, Kanagawa, JP;
Masahiro Kanai, Tokyo, JP;
Atsushi Koike, Kanagawa, JP;
Katsunori Oya, Kanagawa, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A milling apparatus is provided in which temperature rise of a treatment-object in milling treatment, especially of the substrate thereof, is prevented. In the apparatus, ionization mechanismcomprises casinghaving an opening at the center portion of the face thereof opposing to substrateheld by substrate holdera filament is placed at the position where the straight line drawn from the filament to substrateis intercepted by casingand electromagnetsare provided around ionization mechanismfor generating a magnetic field to produce magnetic lines extending through openingto substrate