The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2005
Filed:
Aug. 10, 2000
Daniel Hosten, Handzam, BE;
Helge Schmidt, Speyer, DE;
Michael Schwab, Markdorf, DE;
Tyco Electronics Logistics AG, Steinach, CH;
Abstract
The invention relates to an arrangement enabling a liquid () to flow evenly around a surface of a sample (); said arrangement has a flow chamber () through which a liquid () flows via inflow and outflow pipes (). The sample () can be rotated about an axis of rotation by means of a rotary drive (). A filter () which extends crosswise to the direction of flow of the liquid () and which ensures a uniform flow through the inflow and outflow pipes () is situated in front of the inflow and outflow pipes (). The arrangement is especially suitable for depositing a homogeneous layer of a nickel/iron alloy on a silicon wafer (). The invention relates furthermore to the use of the arrangement.