The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Sep. 08, 2000
Tomoko Ohtsuki, Allentown, PA (US);
Tomoko Ohtsuki, Allentown, PA (US);
Nikon Corporation, Tokyo, JP;
Abstract
An exposure apparatus has a light source comprising a laser device that is small and easy to maintain. The laser device comprises a laser oscillator for generating a single-wavelength laser beam (LB) within a wavelength range including infrared and visible regions; an optical amplifier () for amplifying a laser beam (LB); and a wavelength converter for converting the amplified laser beam into ultraviolet light using a nonlinear optical crystal. The optical amplifier () includes a plurality of stages of optical fiber amplifiers () for sequential amplification of the laser beam (LB), and a narrow-band filter (A) and an isolator (IS) arranged between optical fiber amplifiers.