The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Jun. 12, 2003
Koji Shigematsu, Tokyo, JP;
Koji Shigematsu, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
Abstract
The present invention is directed toward a high performance yet compact projection optical system that is both-sidedly telecentric, has the ability to minimize the reduction of image formation performance that occurs due to the absorption by the glass material used, can secure a sufficiently large numerical aperture and a broad exposure area, and has the ability to very favorably correct aberrations and especially distortion. In a projection optical system that projects a pattern of a first object onto a second object, comprising in order from the first object side, a positive first lens group, a negative second lens group, a positive third lens group, a negative fourth lens group, and positive fifth lens group that provides at least 2 negative lens compositions, and where the fifth lens group includes two lens planes that satisfy the expression φ/φexp≦3.5, and a first lens composition Lconstituted of a first material that satisfies the expression n≦1.57, and where the entire projection optical system described above has two lens planes that satisfy the expression φ/φexp>3.5, and which includes a second lens composition Lconstituted of a second material that satisfies the expression n>1.57.