The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Feb. 19, 2002
Wolfgang Gramann, Regensburg, DE;
Raimund Oberschmid, Sinzing, DE;
Werner Späth, Holzkirchen, DE;
Wolfgang Teich, Regensburg, DE;
Wolfgang Gramann, Regensburg, DE;
Raimund Oberschmid, Sinzing, DE;
Werner Späth, Holzkirchen, DE;
Wolfgang Teich, Regensburg, DE;
Osram GmbH, Munich, DE;
Abstract
A measuring arrangement for measuring product parameters of a component in the epitaxial layer () of a wafer comprises measuring probe () on whose contact side () a recess () is installed, into which an electrolyte can be poured. The electrolyte produces an electrical connection between a contact body (), which is charged with a signal from a pulsed-current source, and the surface () of the wafer (). A detector () serves for detecting the light which is emitted by the component.