The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Jan. 30, 2003
Yasuhiro Nishimori, Miki, JP;
Shuji Omae, Kobe, JP;
Masakatsu Mito, Kobe, JP;
Yuji Ishida, Nishinomiya, JP;
Koji Itadani, Sanda, JP;
Yasuhiro Nishimori, Miki, JP;
Shuji Omae, Kobe, JP;
Masakatsu Mito, Kobe, JP;
Yuji Ishida, Nishinomiya, JP;
Koji Itadani, Sanda, JP;
Daihen Corporation, Osaka, JP;
Abstract
An impedance matching device is provided, for which the electric characteristics at an output terminal are accurately analyzed. The matching device is provided with an input detector for detecting RF voltage and current at the input terminal, and an output detector for detecting RF voltage outputted from the output terminal. The matching device also includes a controller for achieving impedance matching between a high frequency power source connected to the input terminal and a load connected to the output terminal. The impedance matching is performed by adjusting variable capacitors based on the detection data supplied from the input detector. When the impedance of the power source is matched to that of the load, the controller calculates the output impedance, RF voltage and RF current at the output terminal, based on the adjusted capacitances of the capacitors, a pre-obtained reactance-impedance data and the detection data supplied from the output detector.