The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Jun. 03, 2003
Martin Dinant Bijker, Helmond, NL;
Franciscus Cornelius Dings, Veldhoven, NL;
Mauritius Cornelis Maria Van DE Sanden, Tilburg, NL;
Michael Adrianus Theodorus Hompus, Helmond, NL;
Wilhelmus Mathijs Marie Kessels, Tilburg, NL;
Martin Dinant Bijker, Helmond, NL;
Franciscus Cornelius Dings, Veldhoven, NL;
Mauritius Cornelis Maria Van De Sanden, Tilburg, NL;
Michael Adrianus Theodorus Hompus, Helmond, NL;
Wilhelmus Mathijs Marie Kessels, Tilburg, NL;
OTB Group B.V., Eindhoven, NL;
Abstract
A method for the passivation of a semiconductor substrate, wherein a SiN:H layer is deposited on the surface of the substrate () by means of a PECVD process comprising the following steps:
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile