The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Dec. 30, 2002
Applicants:
Cleopatra Cabuz, Edina, MN (US);
Max C. Glenn, Shorewood, MN (US);
Francis M. Erdmann, Maple Grove, MN (US);
Robert D. Horning, Savage, MN (US);
Inventors:
Cleopatra Cabuz, Edina, MN (US);
Max C. Glenn, Shorewood, MN (US);
Francis M. Erdmann, Maple Grove, MN (US);
Robert D. Horning, Savage, MN (US);
Assignee:
Honeywell International Inc., Morristown, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B009/00 ;
U.S. Cl.
CPC ...
Abstract
Layers of boron-doped silicon having reduced out-of-plane curvature are disclosed. The layers have substantially equal concentrations of boron near the top and bottom surfaces. Since the opposing concentrations are substantially equal, the compressive stresses on the layers are substantially balanced, thereby resulting in layers with reduced out-of-plane curvature.