The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Feb. 25, 2003
Juan Jose Gonzalez, Fort Collins, CO (US);
Steve Dillon, Fort Collins, CO (US);
Andrew Shabalin, Fort Collins, CO (US);
Justin Mauck, Fort Collins, CO (US);
Fernando Gustavo Tomasel, Fort Collins, CO (US);
Juan Jose Gonzalez, Fort Collins, CO (US);
Steve Dillon, Fort Collins, CO (US);
Andrew Shabalin, Fort Collins, CO (US);
Justin Mauck, Fort Collins, CO (US);
Fernando Gustavo Tomasel, Fort Collins, CO (US);
Advanced Energy Industries, Inc., Fort Collins, CO (US);
Abstract
In one aspect of the invention is a method to construct plasma chambers with improved wall resistance to deterioration. In one embodiment of the invention, a chamber is made of an aluminum alloy having low concentrations of elements that form non-soluble, intermetallic particles to address coating/substrate issues, has swaged-in cooling tubes to reduce thermal stress by improving thermal resistance, and has a plurality of dielectric gaps to decrease ion bombardment.