The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Aug. 22, 2001
Anilkumar C. Bhatt, Johnson City, NY (US);
Jerome J. Wagner, Endicott, NY (US);
Anilkumar C. Bhatt, Johnson City, NY (US);
Jerome J. Wagner, Endicott, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An organic solvent is separated from a waste stream containing supercritical CO, an organic solvent and etchant contaminants. The process includes separating the supercritical COby subjecting the waste stream to elevated temperature and/or reduced pressure to thereby obtain a first composition containing the supercritical COand a second composition containing the organic solvent and being substantially free of the supercritical CO; and then removing non-volatile etching contaminants from the second stream search as by at least one of the following: