The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Sep. 21, 2004
Kazutaka Yanagita, Kanagawa, JP;
Mitsuharu Kohda, Kanagawa, JP;
Kiyofumi Sakaguchi, Kanagawa, JP;
Akira Fujimoto, Tokyo, JP;
Kazutaka Yanagita, Kanagawa, JP;
Mitsuharu Kohda, Kanagawa, JP;
Kiyofumi Sakaguchi, Kanagawa, JP;
Akira Fujimoto, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
This invention is to appropriately separate a bonded substrate stack regardless of some distortion in the bonded substrate stack or the like. This separating apparatus includes a first nozzle which forms a jet with a large width and a second nozzle which forms a jet with a small width. When the outer portion of a bonded substrate stack is to be separated, a jet formed by the first nozzle is used. After that, when a portion inside the outer portion is to be separated, a jet formed by the second nozzle is used.