The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6945857 B1

PDF
Full Text
Expired
Date of Patent:
Sep. 20, 2005

Filed:

Jul. 08, 2004
Applicants:

Trung Doan, Los Gatos, CA (US);

Venkata R. Balagani, Gilroy, CA (US);

Kenny King-tai Ngan, Fremont, CA (US);

Inventors:

Trung Doan, Los Gatos, CA (US);

Venkata R. Balagani, Gilroy, CA (US);

Kenny King-Tai Ngan, Fremont, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B001/00 ;
U.S. Cl.
CPC ...
Abstract

A recycled polishing pad conditioner comprises a base plate and a reversed abrasive disc that is flipped over from its original configuration. The reversed disc comprises an exposed abrasive face having an unused abrasive face comprising abrasive particles. A bond face of the disc is affixed to the base plate, the bond face comprising a used abrasive face that was previously used to condition polishing pads. Also described is a pad conditioner having an abrasive face comprising exposed portions of abrasive particles, with at least about 60% of the abrasive particles having a crystalline structure with substantially the same crystal symmetry.


Find Patent Forward Citations

Doan, Trung. (2005). Polishing pad conditioner and methods of manufacture and recycling (U.S. Patent No. 6945857). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6945857

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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