The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Jul. 21, 2004
Arjun Selvakumar, Bellaire, TX (US);
Howard D. Goldberg, Sugar Land, TX (US);
Duli Yu, Sugar Land, TX (US);
Matthew Ip, Austin, TX (US);
Martin A. Schmidt, Reading, MA (US);
James L. Marsh, San Antonio, TX (US);
Bing-fai Fung, Austin, TX (US);
Philip Simon, Houston, TX (US);
Arjun Selvakumar, Bellaire, TX (US);
Howard D. Goldberg, Sugar Land, TX (US);
Duli Yu, Sugar Land, TX (US);
Matthew Ip, Austin, TX (US);
Martin A. Schmidt, Reading, MA (US);
James L. Marsh, San Antonio, TX (US);
Bing-Fai Fung, Austin, TX (US);
Philip Simon, Houston, TX (US);
Input/Output, Inc., Stafford, TX (US);
Abstract
An accelerometer () for measuring seismic data. The accelerometer () includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer () also includes a top cap press frame recess () and a bottom cap press frame recess () for isolating bonding pressures to specified regions of the accelerometer (). The accelerometer () is vacuum-sealed and includes a balanced metal pattern () to prevent degradation of the performance of the accelerometer (). A dicing process is performed on the accelerometer () to isolate the electrical leads of the accelerometer (). The accelerometer () further includes overshock protection bumpers () and patterned metal electrodes to reduce stiction during the operation of the accelerometer ().