The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2005
Filed:
Apr. 03, 2003
Hui Zheng, San Jose, CA (US);
Kenneth Tsai, Redwood City, CA (US);
Hong Wang, Cupertino, CA (US);
Yongxiang He, Sunnyvale, CA (US);
Jesus G. Garcia, Iii, Round Rock, TX (US);
Daniel M. Deyo, Cedar Park, TX (US);
Hui Zheng, San Jose, CA (US);
Kenneth Tsai, Redwood City, CA (US);
Hong Wang, Cupertino, CA (US);
Yongxiang He, Sunnyvale, CA (US);
Jesus G. Garcia, III, Round Rock, TX (US);
Daniel M. Deyo, Cedar Park, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A guard for an electrostatic chuck includes a ceramic annulus that has an inner surface shaped to fit around a circumference of the electrostatic chuck, and an outer surface having (i) a top portion with a recessed trench and (ii) a side portion. A metal coating is provided on the top portion of the outer surface.