The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2005

Filed:

Aug. 29, 2003
Applicants:

Yukihisa Takeuchi, Nishikamo-Gun, JP;

Hiroyuki Tsuji, Nagoya, JP;

Kazumasa Kitamura, Ichinomiya, JP;

Nobuo Takahashi, Owariasahi, JP;

Inventors:

Yukihisa Takeuchi, Nishikamo-Gun, JP;

Hiroyuki Tsuji, Nagoya, JP;

Kazumasa Kitamura, Ichinomiya, JP;

Nobuo Takahashi, Owariasahi, JP;

Assignee:

NGK Insulators, Ltd., Nagoya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L041/083 ;
U.S. Cl.
CPC ...
Abstract

A piezoelectric actuator includes comb teeth-shaped piezoelectric actuators, each comprising plural piezoelectric layers. A side surface of each tooth is fired. Actuators are made by (1) preparing a plurality of piezoelectric material green sheets on which electrode films are formed and forming slits on a first green sheet using a punch and a die, (2) pulling up the first green sheet using a stripper, (3) pulling up a top portion of the punch slightly from the lowest portion of the pulled up first green sheet, (4) forming second slits in a second green sheet by the punch, (5) pulling up the second green sheet jointly with the first green sheet, and (6) pulling up the top portion of the punch slightly from the lowest portion of the pulled up second green sheet, and thereafter laminating green sheets by repeating steps (4) through (6). The layers can thereafter be fired.


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