The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2005
Filed:
Jun. 19, 2002
Yasuo Onose, Ibaraki-ken, JP;
Junichi Horie, Hitachinaka, JP;
Seiji Kuryu, Hitachinaka, JP;
Akihiko Saito, Hadano, JP;
Norio Ichikawa, Mito, JP;
Atsuo Watanabe, Hitachiota, JP;
Satoshi Shimada, Hitachi, JP;
Yasuo Onose, Ibaraki-ken, JP;
Junichi Horie, Hitachinaka, JP;
Seiji Kuryu, Hitachinaka, JP;
Akihiko Saito, Hadano, JP;
Norio Ichikawa, Mito, JP;
Atsuo Watanabe, Hitachiota, JP;
Satoshi Shimada, Hitachi, JP;
Hitachi, Ltd., Tokyo, JP;
Hitachi Car Engineering Co., Ltd., Hitachinaka, JP;
Abstract
A sensor with built-in circuits can be improved in the stability of the operation or characteristics. A circuit region and a sensor region are covered by a passivation film. The sensor region is partially covered by the passivation film. The sensor region and circuit region are protected by the passivation film, and an effect of the passivation film on the mechanical displacement of a diaphragm portion can be alleviated so that the sensor with built-in circuits may be improved in the stability of the operation or characteristics.