The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2005
Filed:
Aug. 19, 2003
Applicants:
Yukimitsu Sekimori, Tokyo, JP;
Daiji Uehara, Tokyo, JP;
Inventors:
Yukimitsu Sekimori, Tokyo, JP;
Daiji Uehara, Tokyo, JP;
Assignee:
Nagano Keiki Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L007/00 ;
U.S. Cl.
CPC ...
Abstract
A pressure sensorincluded an upper substratehaving a detection faceA, a diaphragmprovided with a space from the detection substrateand displaceable to and from the upper substrate, fixed electrodesprovided on the detection faceA of the upper substrate, and a first signal fetching sectionelectrically connected to the diaphragm, and the diaphragmis formed by dry-etching single-crystal silicon with the specific resistance lowered to 1.0 Ω·cm or below by mixing dopant lowering the resistance value.