The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2005
Filed:
Oct. 17, 2002
Boo Yong Jung, Kyungki-do, KR;
Dae Cheol Lim, Kyungki-do, KR;
Kyung Gu Kim, Kyungki-do, KR;
LG Electronics Inc., Seoul, KR;
Abstract
Disclosed is a thin-film inspection device with two or more light sources. This device can control the wavelength and intensity of light and illuminate the lights with different incident angles, and are used to control the interference intensity, thereby determining optimal inspection conditions to obtain a reliable inspection result even when different kinds of thin films coexist. The thin films are formed on a flat plate and have different indices of refraction and thicknesses. An incident light control unit is disposed between the illumination unit and the flat plate for controlling the light to be incident on the patterns. A sensor unit detects a reflection light from the patterns. A reflection light control unit is disposed between the flat plate and the sensor unit and controls the light to be detected by the sensor unit. A control unit controls the movement of the illumination unit and the sensor unit.