The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2005
Filed:
Sep. 19, 2003
Jihong Chen, Plano, TX (US);
Zhiqiang Wu, Plano, TX (US);
Kaiping Liu, Plano, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
The present invention provides a semiconductor devicehaving an angled compensation implant, a method of manufacture therefore and a method of manufacturing an integrated circuit including the angled compensation implant. In one embodiment, the method of manufacturing the semiconductor deviceincludes creating a halo implantin a substrate, introducing a compensation implantin the substrateat an angle abnormal to the substrateand forming a source/drain regionabove the compensation implant, the angle reducing a capacitance associated with the halo implantor the source/drain region. The method further includes placing a gate structureover the substrate