Optical member, process of producing optical member, and process of producing thin film

Abstract

An optical member having improved durability characteristics and a process of producing an optical member are provided. The optical member has an antireflection film on a substrate, wherein an outermost layer of the antireflection film is a layer containing, as a major component, vapor deposited silicon dioxide. The outermost layer is further externally provided with a fluorine-containing water-repellent layer. The optical member has the following characteristics: (1) after the water-repellent layer is initially provided, a stationary contact angle (stationary contact angle before rubbing) to water is 104° or more; and (2) after a chamois skin is dipped in water at 25° C. for 5 minutes, and the surface of the water-repellent layer is then rubbed 10,000 times by the chamois skin while applying a load of 500 g, a stationary contact angle (stationary contact angle after rubbing) is from 0 to 10° smaller than the stationary contact angle before rubbing.