The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2005
Filed:
Jan. 20, 2003
Masayoshi Esashi, Sendai-shi, Miyagi, JP;
Kaoru Hirata, Osaka, JP;
Masayoshi Esashi, Sendai-shi, Miyagi, JP;
Kaoru Hirata, Osaka, JP;
Fujikin Incorporated, Osaka, JP;
Other;
Abstract
A high-sensitive and high accuracy vibrating type pressure sensor () allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of noise into a vibrator, comprising a stainless steel pressure receiving diaphragm () for receiving a fluid pressure P on a rear surface side, the vibrator () formed on the front surface side of the pressure receiving diaphragm (), a wall body () disposed so as to surround the periphery of the vibrator (), and a permeable part () for light transmission for changing an internal space in which the vibrator () is present into a vacuum chamber () by closing an opening part () in the wall body (), whereby, since the diaphragm () is formed of the stainless steel with corrosion resistance, the sensor can also be applied to corrosive fluid, since circuit wiring is eliminated from the vibrator () and the vibrator is isolatedly disposed in the vacuum chamber (), mixing of electromagnetic noise can be eliminated, and since the resonance frequency fn of the vibrator () is performed by optical measurement in the state of non-contact, extremely high-sensitive and high-accuracy detection can be performed. A forced vibration device () can also be operated by piezo driving and electrostatic driving from the outside without generating noise.