The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2005
Filed:
Jan. 14, 2004
Kenji Nishi, Yokohama, JP;
Kenji Nishi, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A high exposure accuracy is obtained while mitigating the influence of vibration by using an exposure method and an exposure apparatus. Columns (A,B) are installed on a base plate (), a reticle base () is supported at the inside of the columns (A,B) by the aid of variable mount sections (A,B) having high rigidity, a finely movable stage () is movably placed on the reticle base () by the aid of air bearings, and a reticle (R) as an exposure objective is placed on the finely movable stage (). A coarsely movable stage () is hung on a bottom surface of a support plate () arranged over the reticle base () in a state capable of being driven in a scanning direction. The finely movable stage () is driven by the coarsely movable stage () in the scanning direction in a non-contact state with respect to the reticle base (). The finely movable stage () is finely driven with respect to the coarsely movable stage () by an actuator arranged between the coarsely movable stage () and the finely movable stage ().