The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2005
Filed:
Apr. 14, 2003
Masahiro Morisada, Tochigi, JP;
Masahiro Morisada, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An active damping apparatus including an isolation table mounting a stage and a counter-mass, an isolation table controller operatively connected to the isolation table for supporting the isolation table and adjusting a position and an attitude of the isolation table, a setting unit operatively connected to the controller and adapted to select a combination of the stage and/or the counter-mass to be driven and to set a drive control mode according to what is to be driven, and a control input switch operatively connected to the setting unit and adapted to select a control loop that inputs into the isolation table controller a control target value for adjusting the drive of that which is to be driven according to the drive control mode selected by the setting unit. The active damping apparatus damps vibration by driving the stage and/or counter-mass mounted on the isolation table so as to offset a drive reaction torque and a counter-mass movement moment.