The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6937050 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 30, 2005

Filed:

Mar. 25, 2004
Applicants:

Min-su Fung, Lagrangeville, NY (US);

Roger L. Verkuil, Wappinger Falls, NY (US);

Gregory S. Horner, Santa Clara, CA (US);

William H. Howland, Cortland, OH (US);

Inventors:

Min-Su Fung, Lagrangeville, NY (US);

Roger L. Verkuil, Wappinger Falls, NY (US);

Gregory S. Horner, Santa Clara, CA (US);

William H. Howland, Cortland, OH (US);

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R031/02 ;
U.S. Cl.
CPC ...
Abstract

Corona charges are used to bias a wafer to push down mobile charges and then pull them up during temperature cycles. Mobile charge is measured from the drops in the corona voltage due to the mobile charges. Corrections are made in the measurements for dipole potentials, leakage and silicon band-bending.


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Fung, Min-Su. (2005). Non-contact mobile charge measurement with leakage band-bending and dipole correction (U.S. Patent No. 6937050). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6937050

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