The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2005
Filed:
Mar. 02, 2004
Keiichi Akagawa, Kamakura, JP;
Junji Suzuki, Hachioji, JP;
Tohru Ishizuya, Tokyo, JP;
Yoshihiko Suzuki, Funabashi, JP;
Keiichi Akagawa, Kamakura, JP;
Junji Suzuki, Hachioji, JP;
Tohru Ishizuya, Tokyo, JP;
Yoshihiko Suzuki, Funabashi, JP;
Nikon Corporation, Tokyo, JP;
Abstract
The movable partis fastened to the substratevia flexure partsandand can move upward and downward with respect to the substrateThe substratealso serves as a fixed electrode. The movable parthas second electrode partsandwhich can generate an electrostatic force between these electrode parts and the substrateby means of a voltage that is applied across these electrode parts and the substrateand a current pathwhich is disposed in a magnetic field, and which generates a Lorentz force when a current is passed through this current path. A mirrorwhich advances into and withdraws from the light path is disposed on the movable partAs a result, the mobility range of the movable part can be broadened, and the power consumption can be reduced, without applying a high voltage or sacrificing small size.