The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2005
Filed:
Dec. 04, 2001
Applicant:
Thomas Walsh, Templeton, CA (US);
Inventor:
Thomas Walsh, Templeton, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B005/00 ;
U.S. Cl.
CPC ...
Abstract
A chemical mechanical polishing apparatus is provided. The apparatus includes a single polishing pad and a leaf structure having a pair of fingers. Each finger holds a carrier device designed to hold a wafer to be polished. The leaf structure is configured to apply each of the wafers onto the single polishing pad.