The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2005
Filed:
Aug. 02, 2002
Applicant:
Dinh Ton, Fremont, CA (US);
Inventor:
Dinh Ton, Fremont, CA (US);
Assignee:
Santur Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B026/08 ; G02B026/00 ; H04N003/08 ;
U.S. Cl.
CPC ...
Abstract
A MEMS mirror and method for fabricating the mirror is provided. The mirror has a plurality of structures that operatively rotate around a support structure. The mirror is fabricated, such that the silicon components are separated from a glass structure having electrodes to prevent shorting of the electrodes to the mirror. Additionally, the electrodes are positioned such that providing electrical contact is eased.