The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2005
Filed:
May. 09, 2002
Keishi Kubo, Osaka, JP;
Yukio Imada, Osaka, JP;
Hiroyuki Takeuchi, Osaka, JP;
Kouji Handa, Osaka, JP;
Keiichi Yoshizumi, Osaka, JP;
Keishi Kubo, Osaka, JP;
Yukio Imada, Osaka, JP;
Hiroyuki Takeuchi, Osaka, JP;
Kouji Handa, Osaka, JP;
Keiichi Yoshizumi, Osaka, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
Arranged on both sides of a thin plate are optical displacement gauges that irradiate measurement lights onto surfaces of the thin plate and receive the measurement lights reflected by the surface so as to measure displacements of the surfaces of the thin plate. Variation of thickness of the thin plate is obtained on the basis of the displacements of the surfaces of the thin plate measured by each of the optical displacement gauges. Each of the optical displacement gauges detects the displacement of a respective surface of the thin plate with high accuracy by irradiating the measurement light to the thin plate two times.